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Highest
Flow Capacity - No other comparably sized pressure
regulator on the market can match the high flow to low
pressure droop characteristics of the R100 series. Refer
to flow charts for specifics.
DR Series - Miniature Size with Full Size Performance
- Miniature package size with full size performance
enables system designers to miniaturize and simplify
gas delivery system designs without compromising performance.
Three Outlet Pressure Ranges - Outlet
pressure ranges include R103 - vacuum to 30 psig, R106
- 10 to 60 psig, and R110 - 10 to 100 psig. Maximum
inlet pressure is 250 psig.
Three Body Types; DR, DR2, and SR
- The DR is a miniature ported body regulator with full
size performance. The DR2 is a conventional mini regulator
that meets the Semiconductor industry standard 1/4”
valve footprint. Connections include tube stub and face
seal connections. The SR is a 1 1/8” C-Seal body
type with 3 different porting configurations. The interface
meets the Semiconductor industry standard specifications.
Ultra Clean - The ultimate in high
purity; precision cleaned with Ultra Pass process, with
fully swept internal flow paths with full radius junctions. |
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